MEMS器件縮減模型建模方法研究

論述了微機(jī)電系統(tǒng)(MEMS)器件縮減模型的建立是進(jìn)行MEMS系統(tǒng)級(jí)模擬的關(guān)鍵。論證了基于線性正交振型建立MEMS器件縮減模型是一種有效的方法，導(dǎo)出了MEMS器件動(dòng)態(tài)縮減模型的微分方程，即根據(jù)能量守恒定律，用廣義坐標(biāo)表示系統(tǒng)的各個(gè)能量域，用線性正交振型的疊加對(duì)微分方程進(jìn)行解耦，建立起一組表征器件動(dòng)態(tài)特性的常微分方程，就可以利用現(xiàn)有的系統(tǒng)級(jí)仿真軟件和電路一起進(jìn)行系統(tǒng)級(jí)模擬。

Reduced-order models of MEMS devices are the key step of system-level simulation for MEMS. It is an effective way that reduced-order models of MEMS devices are established based on linear orthogonal mode shapes. The differential equations of dynamic reduced-order models are deduced. According to the law of energy conservation, every energy domain of the system can be represented by generalizing coordinates, and the coupled differential equations can be solved by superposition of linear orthogonal mode shapes. Consequently, a set of differential equations representing dynamic characteristics of MEMS devices can be expressed. As a result, the system-level simulation can be performed by existing software of circuit simulation.