微梁結(jié)構(gòu)熱偶微波功率傳感器芯片的制作工藝

在微波技術(shù)研究中,微波功率是表征微波信號特性的一個重要參數(shù)。微波功率測量已成為電磁測量的重要部分,可應(yīng)用于很多場合,如發(fā)射機(jī)輸出功率(包括天線系統(tǒng)輻射的功率) 和振蕩器輸出功率的測量、毫瓦計的校準(zhǔn)、標(biāo)準(zhǔn)信號發(fā)生器的校準(zhǔn)等。微波功率傳感器是微波功率計探頭中的核心元件。微梁結(jié)構(gòu)熱偶微波功率傳感器芯片選擇具有低電阻溫度系數(shù)的Ta2N 和高熱電功率塞貝克系數(shù)的Si 作為熱偶材料,利用半導(dǎo)體工藝和MEMS 工藝制作,并最終研制成合格的芯片。芯片具有尺寸小、功耗低、靈敏度高、頻帶寬等特點(diǎn)。簡要介紹了芯片的結(jié)構(gòu)原理,并詳細(xì)介紹了芯片的制作工藝。
關(guān)鍵詞: 熱偶; 微波功率; 微梁結(jié)構(gòu)熱偶微波功率傳感器; MEMS 工藝
Abstract : In the research of microwave technology , microwave power is an important parameter which tokens the characteristic of microwave signal. Microwave power measurements have taken an important role in electro2 magnetics ,it can be used in many cases , for example ,it can be used to measure output of transmitter (includes power of antenna system) and monofier ,and to adjust milliwatt power meter and standard signal generator , etc .
Microwave power sensor is the core component of microwave power meter. In the chip of microbridge structure thermocouple type microwave power sensor ,Ta2N of relatively low resistor2temperature coefficient and Si of rela2 tively high thermoelectric power Seebeck coefficient are used as thermocouple materials ,and the chip is fabricated by using semiconductor technics and MEMS technics ,it has many advantages such as small geometry ,low power dissipation ,high sensitivity and wide frequency band. Structure and principle of chip were recommended ,and its fabrication was recommended.
Key words : thermocouple ; microwave power ; microbridge structure thermocouple type microwave power sen2 sor ; MEMS technics